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METHOD FOR NANOMODULATING METAL FILMS BY MEANS OF HIGH-VACUUM CATHODE SPUTTERING OF METALS AND STENCILS

机译:通过金属和模板的高真空阴极溅射法对金属薄膜进行纳米调制的方法

摘要

The present invention relates to a method for nanomodulating metal films by means of high-vacuum cathode sputtering of metals, and to stencils of anodized Al. As an example of the use of these nanomodulated metal films, the synthesis or production of a magnetically weak film by means of cathode sputtering, which film can he used as a magnetic field sensor, and a metal nanomodulated stencil are analyzed.
机译:本发明涉及通过金属的高真空阴极溅射对金属膜进行纳米调制的方法,并涉及阳极氧化铝的模板。作为使用这些纳米调制金属膜的实例,分析了通过阴极溅射合成或生产弱磁膜(该膜可用作磁场传感器)以及金属纳米调制模版。

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