Direct write plasma spraying technology applied to the semiconductor industry

摘要

A direct-write plasma spray technique for semiconductor industry. For coated parts in semiconductors, the sensor is written on the coating by direct-write plasma spraying technology, and the change in coating quality is monitored by sensor to achieve replacing coating of the parts before the coating reaches the end of service life. The method includes, (1) coating a functional coating according to needs of semiconductor component; (2) spraying a small area of other coating over coating, wherein the coating needs to be at a certain performance and first the functional coating of layer is clearly distinguishable; the coating cannot be coated with sensitive metal coating in the semiconductor industry; (3) above the second coating, spraying coating of the same material as the first coating; wherein a thickness is slightly smaller than the first layer of coating; (4) spraying radio over the coating to connect external monitoring equipment.