Direct write plasma spraying method applied in the semiconductor industry

摘要

PROBLEM TO BE SOLVED: To provide a direct drawing type plasma spraying method applied in the semiconductor industry. SOLUTION: A sensor is drawn on a coating layer using a direct drawing type plasma spraying technique on a member having a coating layer in a semiconductor, and a change in the quality of the coating layer is monitored by the sensor, and the life of the coating layer is extended. The coating layer of the member can be changed before the limit is reached. (1) The functional coating layer is coated based on the needs of the semiconductor member. (2) Another coating layer having a small area is sprayed on the coating layer, and the coating layer must have a remarkable difference in performance from the functional coating layer of the first layer, and the coating layer is used in the semiconductor industry. Do not use a reactive metal coating layer in. (3) The coating layer is sprayed onto the coating layer of the second layer with the same material as the coating layer of the first layer, and the thickness of the coating layer is slightly thinner than that of the coating layer of the first layer. (4) A radio is sprayed on the coating layer to connect an external monitoring device. [Selection diagram] Fig. 2