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FOUP PURGE SHIELD

机译:FOUP净化护盾

摘要

A load port for loading wafers to and unloading wafers from a front opening unified pod (FOUP) includes a shield member that covers and provides a seal over an opening of the FOUP. The shield member includes a narrow wafer slot that is sized to allow a single wafer to be loaded to or unloaded from the FOUP but otherwise minimize loss of the purge environment within the FOUP. The shield member is movable so that the wafer slot may be moved vertically to provide a wafer transfer robot access to any desired wafer position within the FOUP. The shield member, for example, may be a flexible sheet that is held taut and is rolled onto and off of at least one roller to vertically position the wafer slot. The shield member may alternatively be one or more rigid members that slide on rails to vertically position the wafer slot.
机译:用于将晶片装载到前开口统一盒(FOUP)或从前开口统一晶片盒(FOUP)卸载晶片的装载端口包括覆盖并在FOUP开口上方提供密封的屏蔽部件。屏蔽构件包括狭窄的晶片槽,该晶片槽的尺寸被设计成允许将单个晶片装载到FOUP或从FOUP卸载,但是否则最小化了FOUP内的净化环境的损失。屏蔽构件是可移动的,因此晶片槽可以垂直移动,以使晶片传送机械手可以接近FOUP中的任何所需晶片位置。屏蔽构件例如可以是柔性片,其被拉紧并被滚动到至少一个辊子上或从其上滚动下来以垂直地定位晶片槽。屏蔽构件可以替代地是一个或多个在轨道上滑动以垂直定位晶片槽的刚性构件。

著录项

  • 公开/公告号US2020035531A1

    专利类型

  • 公开/公告日2020-01-30

    原文格式PDF

  • 申请/专利权人 NANOMETRICS INCORPORATED;

    申请/专利号US201816048200

  • 发明设计人 PAUL A. DOYLE;MORGAN A. CROUCH;

    申请日2018-07-27

  • 分类号H01L21/673;H01L21/67;B08B5;

  • 国家 US

  • 入库时间 2022-08-21 11:19:55

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