FOUP Stage Module having N2 Purge Function

摘要

The FOOP stage module having a nitrogen purge function that is disclosed includes: a FOUP stage unit on which a FOUP (Front Opening Unified Pod) is mounted; And a nitrogen purge device for injecting nitrogen into the FOUP, wherein the nitrogen purge device includes a nozzle unit for injecting nitrogen into the FOUP, and is disposed around the nozzle unit to contact the FOUP to generate the nitrogen. A plurality of nozzle units having a contact pad for preventing leakage, and a stationary-flow tube in which the nozzle part is disposed at an upper end in a tube shape and the nitrogen is supplied from the outside to a lower end; A clamp for clamping the stationary-flow pipe so as to be elevated and lowered; A guide unit to which the clamp is fastened; And a fastening unit for fastening the guide unit and the lower side of the pull stage unit, and fastening the guide unit to be able to move up and down in the vertical direction.