首页>
外国专利>
VERTICAL CAPACITOR STRUCTURE, CAPACITOR COMPONENT, AND METHOD FOR MANUFACTURING THE VERTICAL CAPACITOR STRUCTURE
VERTICAL CAPACITOR STRUCTURE, CAPACITOR COMPONENT, AND METHOD FOR MANUFACTURING THE VERTICAL CAPACITOR STRUCTURE
展开▼
机译:垂直电容器结构,电容器组件以及制造垂直电容器结构的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A vertical capacitor structure includes a substrate, at least a pillar, a first conductive layer, a first dielectric layer and a second conductive layer. The substrate defines a cavity. The pillar is disposed in the cavity. The first conductive layer covers and is conformal to the cavity of the substrate and the pillar, and is insulated from the substrate. The first dielectric layer covers and is conformal to the first conductive layer. The second conductive layer covers and is conformal to the first dielectric layer. The first conductive layer, the first dielectric layer and the second conductive layer jointly form a capacitor component.
展开▼