Method for producing a measuring probe for precision measurement of the material surface in the micro- and nano scale, with the diamond pointer

摘要

The purpose of the notification is to produce a measuring probe for precise measurements of the surface of the material on a micro - and nanoscale using a flat beam (4) of semiconductor or metal,comprising the following steps: placing a flat beam (4) and a powder consisting of diamond micrograins in the chamber of the FIB device; attaching the manipulator needle to the chamber of the FI deviceB to the selected micrograin diamond by means of a metal coil; transport this micrograin diamond to the edge of the flat beam (4) at its free end,from the probe scan site,by means of a manipulator in a chamber of the FIB device; a micrograin connection of a diamond with a beam (4) by placing a metal coil at the point of contact of the beam (4) and one of the side surfaces of the micrograinson the diamond in the FIB chamber; cutting the manipulator needle from the micrograin of the diamond using a concentrated ion beam; forming the micrograin of the diamond in the form of a spike or cone (7)and precise cutting of the top (8) of the moulded diamond micrograin to nanometre dimensions using a concentrated ion beam.