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Method of limiting micro arc discharges in the magnetron sputtering process
Method of limiting micro arc discharges in the magnetron sputtering process
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机译:在磁控溅射工艺中限制微弧放电的方法
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摘要
The essence of the invention is how to prevent microbial arc deposits in less intensively sprayed market areas by using insulating ceramic coatings placed on the market surface in these areas. Insulating ceramic coverings in the form of a ceramic ring (4) and a ceramic ring (5) were used on the market surface.
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