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SOLID SOURCE AND METHOD FOR THE SYNTHESIS OF SILICON-CONTAINING PRECURSORS FOR CHEMICAL VAPOR DEPOSITION
SOLID SOURCE AND METHOD FOR THE SYNTHESIS OF SILICON-CONTAINING PRECURSORS FOR CHEMICAL VAPOR DEPOSITION
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机译:化学气相沉积含硅前体的固体来源和合成方法
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摘要
The present document described a solid source and a method for synthesis of silicon-containing precursors for chemical vapor deposition. The solid source comprises a solid polysilane; an energy coupling agent distributed in the solid polysilane; and hydrogen, mixed with the solid polysilane and the energy coupling agent distributed in the solid polysilane, in a necessary amount to satisfy a hydrogen deficiency during a hydrogenolysis reaction.
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