MAGNETIC LEVITATION SYSTEM FOR TRANSPORTING A CARRIER, CARRIER FOR A MAGNETIC LEVITATION SYSTEM, PROCESSING SYSTEM FOR VERTICALLY PROCESSING A SUBSTRATE, AND METHOD OF TRANSPORTING A CARRIER

摘要

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15). Additionally, the magnetic levitation system includes a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T). The one or more first actuators (121) and the one or more second actuators (132) are arranged above the carrier transportation space (15).