Magnetic levitation system, carrier for magnetic levitation system, vacuum system, and method of transporting carrier

摘要

A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T is described. The magnetic levitation system includes one or more magnetic levitation units 120 , 220 for holding the carrier 10 in the carrier transport space 15 , and a driving unit 130 for moving the carrier 10 in the transport direction T. ), the drive unit 130 comprising a stator part 132 of an asynchronous linear motor arranged laterally with respect to the carrier transport space 15 . A method of transporting a carrier as well as a carrier for a magnetic levitation system is also described.