WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT DEVICE, AND WAVEFRONT MEASUREMENT METHOD
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机译:波前传感器,波前测量装置和波前测量方法
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摘要
A microlens array (3), in which the arrangement direction of a plurality of microlenses is inclined in relation to a scanning direction (11A), is scanned by being moved in a direction crossing a light beam (2A) directed toward an imaging element (4).
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