AN EVAPORATION SOURCE TO DEPOSIT EVAPORATED SOURCE MATERIALS, A METHOD OF SHIELDING EVAPORATED SOURCE MATERIALS AND A SHIELDING DEVICE FOR AN EVAPORATION SOURCE

摘要

Embodiments described herein relate to a shielding device (200) for an evaporation source (20). The evaporation source (20) is configured to guide evaporated source material through one or more outlets (22). The shielding device (200) comprises one or more movable shielding device portions (205) configured to block evaporated source material depending on an emission angle of a plume (342) of evaporated source material from the one or more outlets (22) and configured to be replaced by a movement. A shielding device comprising one or more shielding belts (210) is disclosed. An evaporation source and a method of shielding are also disclosed.