PRODUCTION METHOD FOR CHIP MADE OF THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR MANUFACTURING THERMOELECTRIC CONVERSION MODULE USING CHIP OBTAINED BY SAID PRODUCTION METHOD

摘要

Provided are: a method for producing a chip made of a thermoelectric conversion material, wherein thermoelectric conversion material can be annealed in a form not having a junction with an electrode, and the thermoelectric conversion material can be annealed at the optimal annealing temperature; and a method for manufacturing a thermoelectric conversion module using the chip (13). Also provided are a production method for a chip made of a thermoelectric conversion material, and a method for manufacturing a thermoelectric conversion module using a chip obtained by said production method, the production method comprising: a step (A) for forming a sacrificial layer (2) on a substrate (1); a step (B) for forming a chip, made of the thermoelectric conversion material, on the sacrificial layer (2) obtained from the step (A); a step (C) for annealing the chip, made of the thermoelectric conversion material, obtained from the step (B); and a step (D) for peeling off the annealed chip, made of the thermoelectric conversion material, obtained from the step (C).