首页>
外国专利>
APPARATUS FOR SUPPORTING DEBONDING AND DEBONDING METHOD USING THE SAME
APPARATUS FOR SUPPORTING DEBONDING AND DEBONDING METHOD USING THE SAME
展开▼
机译:用于支持去骨的方法和使用该方法的去骨方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An apparatus for supporting a process of debonding a carrier glass sheet and an ultrathin glass sheet. A suction plate includes a plurality of suction hole portions defining suction holes for suction-holding a glass laminate seated thereon and at least one recess portion defining at least one recess accommodating at least one device layer protruding from one surface of an ultrathin glass sheet of the glass laminate. A plurality of suction cups are fitted to the plurality of suction hole portions, respectively, such that the plurality of suction cups are elastically compressible, in response to contact pressure of the ultrathin glass sheet and the device layer. A vacuum pump is connected to the plurality of suction hole portions to apply negative pressure to the plurality of suction hole portions. A controller controls the vacuum pump to adjust the negative pressure applied to the plurality of suction hole portions.
展开▼