METHOD FOR PREPARING COPPER CALCIUM TITANATE THIN FILM, AND COPPER CALCIUM TITANATE THIN FILM

摘要

The present application provides a method for preparing a copper calcium titanate thin film, and a copper calcium titanate thin film. The copper calcium titanate thin film has excellent step coverage, film thickness uniformity and thin film continuity, and is specially suitable for a structure with a high depth-to-width ratio. The preparation method for the copper calcium titanate thin film comprises: forming a layered deposition structure on a substrate, wherein the layered deposition structure comprises at least one titanium dioxide layer, at least one copper oxide layer and at least one calcium oxide or calcium carbonate layer; and placing the layered deposition structure into an oxygen-containing atmosphere, and subjecting same to a high-temperature annealing treatment so as to obtain the copper calcium titanate thin film.