FLEXIBLE INDUCTOR-SILICON BASED INDUCTOR STRUCTURE-BASED WIND SPEED SENSOR

摘要

A flexible inductor-silicon based inductor structure-based wind speed sensor, which is a two-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor is face-to-face with a metal layer of the silicon-based inductor, and an air cavity that has a sufficient mutual induction electromotive force is retained between the two. A contact block constituting a measurement port is deposited in the metal layer of the silicon-based inductor. The structure of the present invention is lightweight and the response speed is fast. The Bernoulli effect and a mutual inductance effect of a coil are used to achieve wind speed detection, and the heat loss of the inductors is low, which thus reduces the power of the sensor.