Wind Speed Sensor Based on a Flexible Inductor and a Silicon-Based Inductor

摘要

Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.