X-RAY ABSORPTION GRATING MANUFACTURING METHOD AND X-RAY ABSORPTION GRATING

摘要

Disclosed are an X-ray absorption grating manufacturing method and an X-ray absorption grating. The manufacturing method comprises the following steps: manufacturing grating grooves (2a) or grating holes (2b) on a substrate (1) to form a grating groove array or a grating hole array; washing the substrate (1) with an organic solvent, water and a surfactant; adding metal nanoparticles (3) into a volatile solvent and the surfactant to prepare a suspension; under vacuum, filling a grating microstructure with the metal nanoparticle suspension, and the metal nanoparticles (3) settling to fill up the grating grooves (2a) or the grating holes (2b); carrying out detection, and if the filling is not uniform or the metal nanoparticles (3) are not distributed in the grating microstructure, continuing the filling; and cleaning the metal nanoparticles (3) on the surface of the substrate. The absorption grating comprises the substrate (1), the grating groove array or the grating hole array is arranged on the substrate (1), and the grating grooves (2a) or the grating holes (2b) are filled with the metal nanoparticles (3). The performance of the absorption grating is not that different from that of a grating made of a molten metal material, the manufacturing method is simple, an entry barrier is low, the cost is low, and the method is convenient to operate and realize in a common laboratory.