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METHOD AND DEVICE FOR PROCESSING POLYSTYRENE AND GRAPHENE NANOCOMPOSITE MICROSTRUCTURE ARRAY

机译:聚苯乙烯和石墨烯纳米复合材料微结构阵列的处理方法和装置

摘要

A device for processing a polystyrene and graphene nanocomposite microstructure array, comprising: a laser generator, a vacuum cavity, a stage, an ultraviolet filter lens, and a gas flow control unit; wherein the stage is mounted at the bottom inside the vacuum cavity in a detachable fixing mode, and the vacuum cavity is provided with open and closed channels; the ultraviolet filter lens is mounted in the vacuum cavity, the laser generator emits a laser to irradiate the stage located in the vacuum cavity by penetrating the ultraviolet filter lens, and the stage is used for placing an object to be processed; the gas flow control unit is in communication with the vacuum cavity, and used for controlling gas entering the vacuum cavity; and the vacuum cavity is fixedly mounted on a triaxial precision motion platform by means of a vacuum cavity fixture. For the problem that the polystyrene and graphene nanocomposite material microstructure array is difficult to process at present, the present invention aims to provide the device for processing the polystyrene and graphene nanocomposite microstructure array.
机译:一种用于加工聚苯乙烯和石墨烯纳米复合材料微结构阵列的装置,包括:激光发生器,真空腔,平台,紫外滤光镜和气体流量控制单元;其中,载物台以可拆卸的固定方式安装在真空腔内部的底部,并且真空腔设有开闭通道。紫外滤光镜安装在真空腔内,激光发生器通过穿透紫外滤光镜发射激光以照射位于真空腔内的载物台,该载物台用于放置待处理物体。气体流量控制单元与真空腔连通,用于控制进入真空腔的气体。真空腔通过真空腔夹具固定安装在三轴精密运动平台上。针对目前聚苯乙烯石墨烯纳米复合材料微结构阵列难以加工的问题,本发明的目的是提供一种聚苯乙烯石墨烯纳米复合材料微结构阵列的加工装置。

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