首页> 外国专利> PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR PRODUCING SHAPED OBJECT BY PLATING

PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR PRODUCING SHAPED OBJECT BY PLATING

机译:光敏树脂组合物,形成抗蚀剂图案的方法以及通过电镀生产异型物体的方法

摘要

The present invention is a photosensitive resin composition which comprises an alkali-soluble resin (A), one or more polymerizable compounds (B), a free-radical photopolymerization initiator (C), and a solvent (D), wherein the polymerizable compounds (B) include at least one compound (B1) selected from among compounds represented by formula (1) and compounds represented by formula (3), the formulae (1) and (3) each including specific R moieties, the content of the compound (B1) in the photosensitive resin composition being 15-50 mass%. The photosensitive resin composition of the present invention can form thick resist patterns excellent in terms of sensitivity and resolution. Use of the thick resist patterns makes it possible to produce finer shaped object by plating.
机译:本发明是一种光敏树脂组合物,其包含碱溶性树脂(A),一种或多种可聚合化合物(B),自由基光聚合引发剂(C)和溶剂(D),其中所述可聚合化合物( B)包括选自由式(1)表示的化合物和由式(3)表示的化合物中的至少一种化合物(B1),式(1)和(3)各自包括特定的R部分,化合物(感光性树脂组合物中的B1)为15〜50质量%。本发明的光敏树脂组合物可以形成在灵敏度和分辨率方面优异的厚抗蚀剂图案。厚抗蚀剂图案的使用使得可以通过电镀产生更细的形状的物体。

著录项

  • 公开/公告号WO2020195285A1

    专利类型

  • 公开/公告日2020-10-01

    原文格式PDF

  • 申请/专利权人 JSR CORPORATION;

    申请/专利号WO2020JP05444

  • 申请日2020-02-13

  • 分类号C08F220/20;C08F220/36;G03F7/027;G03F7/033;G03F7/20;H01L21/60;

  • 国家 WO

  • 入库时间 2022-08-21 11:09:14

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号