THREE-AXIS MEMS ACCELEROMETER WITH SYMMETRIC STRUCTURE

摘要

The present invention relates to a three-axis MEMS accelerometer with a symmetric structure. The three-axis MEMS accelerometer comprises: a first mass unit moving along the movement of an x-axis or y-axis; a first spring unit connecting the first mass unit to a predetermined fixed position; a second mass unit installed in space formed at the center of the first mass unit and moving along the movement of a z-axis; and a second spring unit connecting the second mass unit to the first mass unit. The first and second mass units are symmetrical. The three-axis MEMS accelerometer may improve the z-axis sensitivity while reducing a size in comparison with an existing accelerometer.;COPYRIGHT KIPO 2020