HIGH PURITY METAL HALIDE, PREPARATION METHOD THEREOF, ORGANIC ELECTROLUMINESCENT DEVICE COMPRISING HIGH PURITY METAL HALIDE

摘要

The present invention relates to a metal halide preparation method enabling the stable production of inorganic thin films with favorable quality while securing high efficiency in a deposition process without deterioration of vacuum or scattering of materials during deposition. The present invention also relates to a deposition target using the high purity metal halide prepared therefrom, and an inorganic electroluminescent device having the inorganic thin film formed by the target. The metal halide contains alkali metals, halogen and inevitable impurities.;COPYRIGHT KIPO 2020