Vacuum Evaporation Coating Apparatus for Coating Multiple Substrates using Revolution Rotation and Tilting

摘要

A multi-substrate vacuum deposition apparatus comprises a chamber, a dome unit, a revolving unit, and a rotating unit. The dome unit is accommodated in the chamber and closes at least the upper side of the inner space of the chamber. One side of the revolving unit is coupled to the upper outer side of the chamber and the other side of the revolving unit penetrates through the upper part of the chamber to be coupled to the dome unit. The revolving unit rotates the dome unit through rotation. One side of the rotating unit is coupled to the other side of the revolving unit to revolve and tilt, and the other side of the rotating unit penetrates through the dome unit to fix a substrate and rotates the substrate while rotating.