Study of nanostructured (Ti-Zr-Nb)N coatings' physical- mechanical properties obtained by vacuum arc evaporation

摘要

The coatings were formed by vacuum arc deposition. Unit cast target (cathodes) was used on the basis of 30 atm. % Ti, 35 at. % Zr and 35 atm. % Nb as the vaporized materials. Molecular nitrogen was used as the working gas. The thickness of the coatings in the experiments was 4.0 microns. The surface morphology fractograph fracture, track friction were investigated in a scanning electron microscope JSM-6390 LV. The use of multicoatings based on carbides is very promising to ensure the high performanceudproperties of the complex, nitrides and silicides of transition metals. Findings – nanostructured coating of (Ti-Zr-Nb) N was obtained by vacuum arc evaporation cathode-cast in a nitrogen gas reaction medium. Multicomponent films have a pronounced columnar structure. Elemental composition was obtained by the vacuum arc deposition of coatings (Ti-Zr-Nb) N, depending on the physical parameters of theuddeposition process, in particular the pressure of the reaction gas nitrogen.