Vacuum Evaporation Coating Apparatus for Coating Multiple Substrates using Revolution Rotation and Tilting

摘要

The multi-substrate vacuum deposition apparatus includes a chamber, a dome portion, an idle portion, and a rotating portion. The dome portion is embedded in the chamber and closes at least the upper side of the interior space of the chamber. The revolving portion has one side coupled to the upper outside of the chamber, the other side penetrates the upper portion of the chamber to engage the dome portion, and rotates the dome portion through rotation. The rotating part rotates and rotates the substrate while one side is coupled to the other side of the revolving portion to rotate and tilt, and the other side passes through the dome portion to fix and rotate the substrate.