MEMS mirror and Lissajous scan driving method of the same

摘要

The present invention relates to a driving method of selecting a driving frequency simultaneously satisfying high speed and high resolution and applying the selected driving frequency when a MEMS mirror realizes a Lissajous scan, and a MEMS mirror having a wide resonant bandwidth formed by designing a low quality factor (Q-factor) of a MEMS mirror to efficiently apply the same. The MEMS mirror and the Lissajous scan driving method thereof can efficiently select a driving frequency for a Lissajous scan of a MEMS mirror within a resonant bandwidth to apply the driving frequency, thereby obtaining high-speed high-resolution scan results. Specifically, the driving frequency selection method for high speed and high resolution can be applied to realize a Lissajous scan having 100% of a fill factor in 0.025 seconds.