Filtration apparatus, purification apparatus, manufacturing apparatus of chemical medical solution, filtration completed refining substance, chemical medical solution, and actinic-ray-sensitive or radiation-sensitive resin composition

摘要

An object of the present invention is to provide a filtration device in which a chemical liquid having excellent performance is obtained and the life of the filter medium is sufficiently long. Moreover, it is a subject to provide a refiner | purifier, the manufacturing apparatus of a chemical | medical solution, a filtered to-be-refined substance, a chemical | medical solution, and actinic-ray-sensitive or radiation-sensitive resin composition. The filtration apparatus of this invention is at least 1 selected from the group which consists of the following requirements 1-3 which are arrange | positioned independently in the pipeline to which a refined substance is supplied; Requirement 1: The filter has a filter medium comprising at least two layers, each comprising a different material. Requirement 2: The filter has a filter medium comprising two or more layers having different pore structures. Requirement 3: A first filter unit comprising a first filter and a housing accommodating the first filter, wherein the filter has a filter medium comprising one layer of different materials mixed therein, and a first filter unit different from the first filter. It has a 2nd filter unit which consists of a housing which accommodates a 2nd filter and a 2nd filter.