Cathode assembly with dual position magnetron and centrally supplied coolant

摘要

Provided herein are embodiments of a magnetron assembly, and a processing system including the magnetron assembly. In some embodiments, the magnetron assembly includes a body extending along a central axis of the magnetron assembly; Coolant feed structure, the coolant feed structure extending through the body along the central axis to provide coolant to the area below the coolant feed structure along the central axis; And a rotatable magnet assembly coupled to the bottom of the body and having a plurality of magnets. In some embodiments, the rotatable magnet assembly is configured to move vertically.