VCSEL Highly efficient oxidation-type VCSEL with improved light extraction and method for manufacturing thereof

摘要

The present invention relates to a vertical-cavity surface-emitting laser (VCSEL) and a manufacturing method thereof. More particularly, the present invention relates to a high-efficiency oxidation-type VCSEL having a peak wavelength of 860 nm and a manufacturing method thereof. According to the present invention, the oxidation-type VCSEL comprises a conductive current diffusion layer transmitting a laser having a peak wavelength of 860 between an upper electrode and an upper dispersion Bragg reflector, having a lower refractive index than the upper dispersion Bragg, and having an upper surface roughened.