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VCSEL Highly efficient oxidation-type VCSEL with improved light extraction and method for manufacturing thereof
VCSEL Highly efficient oxidation-type VCSEL with improved light extraction and method for manufacturing thereof
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机译:VCSEL具有改善的光提取的高效氧化型VCSEL及其制造方法
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摘要
The present invention relates to a vertical resonant surface emitting laser (VCSEL) and a method for manufacturing the same, and more particularly, to a high-efficiency oxidation type vertical resonant surface emitting laser emitting a laser having a peak wavelength of 860 nm and a manufacturing method thereof.
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