CCD APPARATUS AND METHOD OF CONTROLLING ELECTRONIC BEAM SPOT USING CCD CAMERA IMAGE

摘要

According to one embodiment of the present invention, an apparatus for controlling focus of an electron beam by using a CCD camera image comprises: a fluorescent screen provided to be inclined on a path of an electron beam; a CCD camera disposed at a position perpendicular to the path of the electron beam around the fluorescent screen to photograph an image of the fluorescent screen including focus formed by the electron beam; a control module generating a control signal for moving current coordinates of the focus included in the photographed image of the fluorescent screen to known target coordinates; and a steering module controlling a trajectory of the electron beam according to the generated control signal.