CCD APPARATUS AND METHOD OF CONTROLLING ELECTRONIC BEAM SPOT USING CCD CAMERA IMAGE

摘要

An apparatus for controlling focus of an electron beam using a CCD camera image according to an embodiment of the present invention includes a single fluorescent screen provided obliquely on the path of the electron beam and a vertical position of the path of the electron beam around the fluorescent screen One CCD camera for capturing an image of a fluorescent screen including a focus formed by an electron beam, and a control for moving the current coordinates of the focus included in the image of the captured fluorescent screen to a known target coordinate It includes a control module for generating a signal, a steering module for controlling the trajectory of the electron beam according to the generated control signal, the control module is an image processing module for detecting the current coordinates of focus from the image of the captured fluorescent screen, and shooting Compensation to obtain components of each axis of the correction vector by subtracting the current coordinates from the target coordinates of the image of the fluorescent screen The emitter and the calculation module, generate a control signal for generating a control signal for each axis component of the correction vector module may include.