MIRROR DEVICE FOR INTERFEROMETER DEVICE, INTERFEROMETER DEVICE, MANUFACTURING METHOD OF MIRROR DEVICE FOR INTERFEROMETER DEVICE, AND MANUFACTURING METHOD OF INTERFEROMETER DEVICE

摘要

The present invention relates to a mirror device (1) for an interferometer device (Int), which includes a mirror layer (3) having a fixing part (B) surrounding the mirror layer (3) at least partially in the lateral direction, and a substrate (2) on which the fixing part (B) is mounted. The mirror layer (3) is mechanically clamped through the fixing part (B), and the fixing part (B) shows a curve (K) having a radius which changes in azimuth when viewed in a plan view of the substrate (2).;COPYRIGHT KIPO 2020