Mirror device for an interferometer device, interferometer device, method for producing a mirror device for an interferometer device, and method for producing an interferometer device

摘要

The invention relates to a mirror device (1) for an interferometer device (Int), comprising a mirror layer (3) with an anchoring (B) which at least partially surrounds the mirror layer (3) laterally; and a substrate (2) on which the anchor (B) is attached, the mirror layer (3) being mechanically clamped over the anchor (B), and the anchor (B) in a plan view of the substrate (2) Curve (K) describes the radius of which varies azimuthally.