Mirror device for an interferometer device, interferometer device and method for producing a mirror device for an interferometer device

摘要

The present invention provides a mirror device (1) for an interferometer device, comprising a substrate with a mirror layer (3) arranged thereon, the mirror layer (3) comprising an optical region (OA) in a central region (MB) of the mirror layer (3); comprises a spring region (4) which at least partially surrounds the central region (MB) laterally and comprises at least one stiffness-reducing recess (4a); and can be actuated via the spring area (4).