Optical measurement apparatus chemical supply equipment comprising optical measurement apparatus and processing equipment comprising optical measurement apparatus using chemical

摘要

The present invention relates to an optical measurement apparatus, a chemical supply apparatus including the optical measurement apparatus, and a process apparatus using chemical including the optical measurement apparatus. According to an embodiment of the present invention, the optical measurement apparatus comprises: a light source; a penetration unit including a body, a first surface which is one of outer surfaces of the body, a second surface facing the first surface, an incidence surface through which light emitted from the light source is incident into the body, a contact surface which is arranged on the first surface and comes in contact with a sample, and an emission surface which is arranged on the second surface, and through which the light incident into the body is emitted to the outside; and a detection unit which receives the light emitted from the penetration unit. The incidence surface is arranged to be inclined by a certain angle against the second surface to allow the incidence angle, which is the angle at which the light incident through the incidence surface is incident into the contact surface, to be a critical angle or greater. The optical measurement apparatus, the chemical supply apparatus including the optical measurement apparatus, and the process apparatus using chemical including optical measurement apparatus can remove noise of signals and improve resolution.