ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND ELECTRON BEAM IMAGE ACQUIRING METHOD

摘要

One aspect of the present invention relates to an electron beam image acquisition apparatus and electron beam image acquisition method, capable of detecting secondary electrons with high accuracy. According to one aspect of the present invention, the electron beam image acquisition apparatus includes: a first electrostatic lens group for correcting a shift amount of a focus position of a primary electron beam from a reference position on a surface of a substrate, which is generated according to a movement of a stage, and correcting a plurality of variation amounts of the primary electron beam on the surface of the substrate, which are generated by correcting the shift amount of the focus position of the primary electron beam; and a second electrostatic lens group for correcting a plurality of variation amounts of an image of a secondary electron beam, which is emitted from the substrate by irradiating the substrate with the primary electron beam corrected by the first electrostatic lens group, and passes through at least one electrostatic lens of the first electrostatic lens group.