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Deposition Method of Super Coating Flim Having High-Adhesion and High-Hardness

机译:具有高附着力和高硬度的超级涂层毛料的沉积方法

摘要

An object of the present invention is to provide a method for depositing a multi-component coating film having excellent adhesion while maintaining ultra-high hardness, which is an inherent characteristic of a nanocomposite structure. The method for depositing the multi-component coating film according to the present invention includes: step (a) of performing etching on the surface of a target base material through ion collision; and step (b) of forming the multi-component coating film by ionizing a target by an arcing phenomenon and depositing a plurality of layers on the surface of a target substrate in a predetermined order.
机译:本发明的目的是提供一种沉积具有优异粘附力同时保持超高硬度的多组分涂膜的方法,该超高硬度是纳米复合结构的固有特性。根据本发明的用于沉积多组分涂膜的方法包括:步骤(a)通过离子碰撞在目标基材的表面上进行蚀刻;步骤(b):通过电弧现象使靶离子化,并以预定顺序在靶基板的表面上沉积多层,从而形成多组分涂膜。

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