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Deposition Method of Super Coating Flim Having High-Adhesion and High-Hardness
Deposition Method of Super Coating Flim Having High-Adhesion and High-Hardness
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机译:具有高附着力和高硬度的超级涂层毛料的沉积方法
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摘要
An object of the present invention is to provide a method for depositing a multi-component coating film having excellent adhesion while maintaining ultra-high hardness, which is an inherent characteristic of a nanocomposite structure. The method for depositing the multi-component coating film according to the present invention includes: step (a) of performing etching on the surface of a target base material through ion collision; and step (b) of forming the multi-component coating film by ionizing a target by an arcing phenomenon and depositing a plurality of layers on the surface of a target substrate in a predetermined order.
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