MEASURING APPARATUS OF PARTICULATE MATTER USING MICRO RESONATOR AND MEASURING METHOD THEREOF

摘要

The present invention relates to an apparatus and method for measuring fine dust using a micro resonator, and more specifically, a sensor array including a reference sensor, a resonator sensor for measuring fine dust, and a humidity measuring sensor for detecting humidity; A frequency comparator comparing frequency differences between the reference sensor and the resonator sensor for measuring fine dust and the sensor for measuring humidity; A processing unit for correcting the output value of the resonator sensor for measuring fine dust by subtracting and calculating an output value of the sensor for measuring humidity from the output value of the resonator sensor for measuring fine dust in the frequency comparison unit; And a voltage converting unit converting the output value of the processing unit into a voltage. According to the present invention, there is an excellent effect of significantly improving the inaccuracy of the measurement of fine dust concentration due to humidity of a conventional resonator-based sensor.