VARIABLE TEMPERATURE SCANNING PROBE MICROSCOPE

摘要

According to an embodiment of the present invention, in a variable-temperature scanning probe microscope, the sample mount and the SPM head are separated into a thermal barrier member having a high thermal resistance to prevent the temperature of the SPM head from rising when scanning the sample surface, thereby allowing the SPM probe to sample. The scan operation on the surface can be controlled more accurately. In addition, a sample reservoir for storing a plurality of samples formed to have different heat treatments or compositions is implemented in an ultra-low temperature section, so that a plurality of samples can be stored for a long period of time without contamination, thereby rapidly and repeatedly measuring samples under various conditions. To make.