1 1 CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH AN ARRAY OF PRIMARY CHARGED PARTICLE BEAMLETS AND METHOD OF IMAGING OR ILLUMINATING A SPECIMEN WITH AN ARRAY OF PRIMARY CHARGED PARTICLE BEAMLETS

摘要

A charged particle beam device for inspection of a sample using an array of primary charged particle beamlets is described. The charged particle beam device includes a charged particle beam source for generating a primary charged particle beam; A multiple aperture plate having at least two apertures for creating an array of charged particle beamlets having at least a first beamlet having a first resolution on the sample and a second beamlet having a second resolution on the sample; An aberration correction element for correcting at least one of spherical aberrations and chromatic aberrations of rotationally symmetric charged particle lenses; And an objective lens assembly for focusing each primary charged particle beamlet in the array of primary charged particle beamlets onto a separate location on the sample.