CHEMICAL MATERIAL LEAK BLOCKING TRAY FOR ELECTRONIC COMPONENT PROCESSING EQUIPMENT AND INSTALLMENT METHOD OF CHEMICAL MATERIAL LEAK BLOCKING TRAY FOR ELECTRONIC COMPONENT PROCESSING EQUIPMENT

摘要

The present invention is formed in a size that is disposed between an electronic component processing equipment using chemicals and an access floor supporting the processing equipment, and passes through the chemical discharge pipe of the processing equipment to allow the access floor to extend downward. It is provided with a bottom plate having a through hole and a wall plate formed to protrude from the bottom plate to receive a chemical leaking from the electronic component processing equipment together with the bottom plate, and formed of a corrosion-resistant material. Blocking base; A dam member of a corrosion-resistant material formed to surround an area corresponding to the passage hole, located in an area where the wall plate is defined, and spaced apart from the wall plate; A gap filling member made of a corrosion-resistant material disposed to fill a gap between the chemical discharge pipe and the dam member; A support member disposed to surround the chemical discharge pipe and supporting the gap filling member; And a sealing member formed by hardening while a sealing material, a corrosion-resistant material, is poured into a limited space defined by the chemical discharge pipe, the gap filling member, the dam member, and the supporting member, the chemical leakage for electronic component processing equipment. Provides a method of installing a blocking tray and a chemical leakage blocking tray for electronic component processing equipment.