CHEMICAL MATERIAL LEAK BLOCKING TRAY FOR ELECTRONIC COMPONET PROCESSING EQUIPMENT, AND INSTALLMENT METHOD OF CHEMICAL MATERIAL LEAK BLOCKING TRAY FOR ELECTRONIC COMPONET PROCESSING EQUIPMENT

摘要

The present invention is formed in a size that is disposed between an electronic component processing equipment using chemicals and an access floor supporting the processing equipment, and passes through a chemical discharge pipe of the processing equipment to allow the access to extend downward. A bottom plate having a first through hole and a wall plate protruding from the bottom plate to form a space for receiving chemicals leaked from the processing equipment together with the bottom plate, and blocking formed of a corrosion-resistant material Base; A dam member of a corrosion-resistant material protrudingly formed on the bottom plate so as to surround an area corresponding to the first passage hole, and spaced apart from the wall plate within an area defined by the wall plate; A gap of a corrosion-resistant material through which the chemical discharge pipe passes and has a second through hole having an inner diameter smaller than the first through hole, and is coupled to the bottom plate to close the first through hole without overlapping the dam member Thumbnails; And a sealing member made of a corrosion-resistant epoxy material cured while being poured into a space defined by the chemical discharge pipe, the gap reduction plate, the bottom plate, and the dam member, electronics Provides a method for preventing chemical scattering for parts processing equipment and a method for installing a chemical leakage blocking tray for electronic parts processing equipment.