METHOD FOR PRODUCING INDIUM HYDROXIDE POWDER METHOD FOR PRODUCING INDIUM OXIDE POWDER AND SPUTTERING TARGET

摘要

Indium hydroxide powder having a uniform particle size and a narrow particle size distribution is prepared. In the method of producing indium hydroxide powder by electrolysis using metal indium on the anode, the electrolyte concentration of the electrolyte is 0.1 to 2.0 mol/L, the pH is 2.5 to 5.0, the liquid temperature is 20 to 60°C, and the electrode current The density is set to ⁴ to 20 A/dm ² , and electrolysis is performed so that the concentration of the electrolytic slurry containing the precipitated indium hydroxide powder is within a range of 2 to 15%.