An electrolytic apparatus for indium hydroxide powder or tin hydroxide powder, a method for producing indium hydroxide powder or tin hydroxide powder, and a method for manufacturing a sputtering target

摘要

PROBLEM TO BE SOLVED: To provide an electrolytic device for indium hydroxide powder or tin hydroxide powder, in which the indium hydroxide powder or tin hydroxide powder having excellent particle size uniformity and a narrow particle size distribution width can be generated.SOLUTION: The electrolytic device 1 for electrolyzing indium or tin to generate indium hydroxide powder or tin hydroxide powder includes: an electrolytic cell 10 in which an electrolytic solution 11 is stored and a plurality of electrodes are arranged in parallel at predetermined intervals; an adjustment tank 20 for adjusting the electrolytic solution; a feed nozzle 32 which is arranged in the vicinity of a tank wall 17a of the electrolytic cell and used for jetting the electrolytic solution toward, at least, the space between electrodes in parallel with the width direction of the electrode; and a suction nozzle 34 which is arranged in the vicinity of the tank wall 17b of the electrolytic cell at a position opposed to the feed nozzle. The electrolytic solution is withdrawn from the electrolytic cell and jetted through the feed nozzle toward the adjustment tank side in parallel with the width direction of the electrode and the jetted electrolytic solution is sucked through the suction nozzle and transferred to the adjustment tank so that the electrolytic solution is circulated between the electrolytic cell and the adjustment tank.SELECTED DRAWING: Figure 1