- BOOM DRIVE APPARATUS MULTI-ARM ROBOT APPARATUS ELECTRONIC DEVICE PROCESSING SYSTEMS AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING SYSTEMS

摘要

A boom drive device for substrate transport systems and methods is described. The boom drive device is adapted to drive one or more multi-arm robots rotatably mounted on a boom to place or pick substrates efficiently. The boom drive device includes a hub, a web, a boom including a first pilot above the web and a second pilot below the web, a first driving member rotatably mounted to the first pilot, and a second rotatably mounted to the second pilot. A driving member, a first driven member rotatably mounted to the boom above the web, a second driven member rotatably mounted to the boom below the web, and the driving members to the driven members located outside the ship on the boom. It has first and second transmission members coupling. Various other aspects are provided.