Purification method of thinner waste and thinner composition manufactured thereby

摘要

The present invention relates to a method for purifying a waste thinner liquid used in a semiconductor or display manufacturing process through a distillation step, and a thinner composition obtained thereby. In particular, the method for purifying waste thinner liquid according to the present invention recovers the waste liquid from the thinner used in the rinsing process for cleaning photoresist during the semiconductor or display manufacturing process, and obtains cyclohexanone and methyl amyl ketone (MAK) therefrom. It can be removed to provide an industrially reusable thinner composition.