METHOD FOR PURIFYING WASTE SOLUTION OF THINNER AND THINNER COMPOSITION OBTAINED THEREFROM

摘要

The present invention relates to a method for purifying a waste solution of a thinner and, more specifically, to a method for purifying a waste solution of thinner, by which a waste solution of a thinner used in a rinse process for cleaning a photoresist in a semiconductor fabrication process can be used in a rinse process of a display manufacturing process. Without adding a specific compound or using specific equipment other than for distillation in order to remove impurities, a purified product can be immediately used as a thinner composition without the addition of a specific ingredient, and thus economic efficiency can be improved.