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METHOD FOR CHEMICAL INFILTRATION OR DEPOSITION FROM THE STEAM PHASE
METHOD FOR CHEMICAL INFILTRATION OR DEPOSITION FROM THE STEAM PHASE
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机译:从蒸汽阶段化学渗透或沉积的方法
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摘要
in which n is an integer equal to 0 or 1; m is an integer lying in the range 1 to 3; p is an integer lying in the range 0 to 2 with m+p=3; and R designates —H or —CH3; a ratio C/Si between the number of carbon atoms and the number of silicon atoms in the introduced gas phase lying in the range 2 to 3.
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